JPH01162645U - - Google Patents
Info
- Publication number
- JPH01162645U JPH01162645U JP5736888U JP5736888U JPH01162645U JP H01162645 U JPH01162645 U JP H01162645U JP 5736888 U JP5736888 U JP 5736888U JP 5736888 U JP5736888 U JP 5736888U JP H01162645 U JPH01162645 U JP H01162645U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pressure
- pressure circuit
- detection device
- measuring device
- suction pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 6
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988057368U JP2544058Y2 (ja) | 1988-04-28 | 1988-04-28 | 真空圧回路の漏洩検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988057368U JP2544058Y2 (ja) | 1988-04-28 | 1988-04-28 | 真空圧回路の漏洩検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01162645U true JPH01162645U (en]) | 1989-11-13 |
JP2544058Y2 JP2544058Y2 (ja) | 1997-08-13 |
Family
ID=31283227
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988057368U Expired - Lifetime JP2544058Y2 (ja) | 1988-04-28 | 1988-04-28 | 真空圧回路の漏洩検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2544058Y2 (en]) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52129257U (en]) * | 1976-03-02 | 1977-10-01 | ||
JPS5371480U (en]) * | 1976-11-17 | 1978-06-15 | ||
JPS61132379U (en]) * | 1985-02-06 | 1986-08-18 | ||
JPS6225319U (en]) * | 1985-07-31 | 1987-02-16 | ||
JPS62197731A (ja) * | 1986-02-25 | 1987-09-01 | Fuji Electric Co Ltd | 半導体圧力センサ |
-
1988
- 1988-04-28 JP JP1988057368U patent/JP2544058Y2/ja not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52129257U (en]) * | 1976-03-02 | 1977-10-01 | ||
JPS5371480U (en]) * | 1976-11-17 | 1978-06-15 | ||
JPS61132379U (en]) * | 1985-02-06 | 1986-08-18 | ||
JPS6225319U (en]) * | 1985-07-31 | 1987-02-16 | ||
JPS62197731A (ja) * | 1986-02-25 | 1987-09-01 | Fuji Electric Co Ltd | 半導体圧力センサ |
Also Published As
Publication number | Publication date |
---|---|
JP2544058Y2 (ja) | 1997-08-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH01162645U (en]) | ||
JPS6081370U (ja) | 弁グランド部の漏洩防止装置 | |
JPS63187774U (en]) | ||
JPS60115165U (ja) | バキユ−ムタンク | |
JPH02248643A (ja) | シリンダヘッドカバー用シール部材 | |
JPS6085687U (ja) | ホ−ス継手 | |
JPS58157089U (ja) | 管継手 | |
JPH01108456U (en]) | ||
JPH01108455U (en]) | ||
JPH02103577U (en]) | ||
JPH0354709U (en]) | ||
JPS6411311U (en]) | ||
JPH03108967U (en]) | ||
JPS6059872U (ja) | バタフライ弁 | |
JPS6061567U (ja) | 寒冷地用逆流防止弁 | |
JPS5993045U (ja) | ケ−ス間のシ−ル機構 | |
JPS59139673U (ja) | 仕切弁のグランド部漏洩防止具 | |
JPS61200981U (en]) | ||
JPS5855868U (ja) | ガスケツト脱着装置 | |
JPH02125271U (en]) | ||
JPH037213U (en]) | ||
JPH01136700U (en]) | ||
JPS6140592U (ja) | 管継手 | |
JPS59105680U (ja) | 高圧ホ−ス金具 | |
JPS5986489U (ja) | 管内接合式一体化継手 |